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Fully Automatic Pressure Curing Oven – PCO 1300

PCO 1300 photo

A Fully automatic Pressure Curing Oven with 300mm EFEM.

  • Oven Size (mm): 2,200[W] x 2,200[D] x 2,475[H]
  • Chamber Usable Area (mm): 560[W] x 680[D] x 480[H]
  • Max Operating Pressure: 20 bar (290 psi)
  • Max Operating Temperature: 260⁰ C
  • Nitrogen Enabled (option)
  • Cleanroom Class 100 (option)
  • Vacuum down to 5 Torr (option)
  • Fully Automatic Loading with EFEM (300mm wafer)

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