Oven Size Including Loaders (mm): 5,670[W] x 2,470[D] x 2,210[H] 4 Magazine Capacity (510x515mm panels) Max Temp: 200C Nitrogen Environment with O2 Levels Down to 100ppm Cleanroom Class 1000 Internal Conveyor SECS/GEM Temperature Uniformity ±3C Your browser does not support the video tag.