Oven Size (mm): 2,200[W] x 2,200[D] x 2,475[H] Chamber Usable Area (mm): 560[W] x 680[D] x 480[H] Max Operating Pressure: 20 bar (290 psi) Max Operating Temperature: 260⁰ C Nitrogen Enabled (option) Cleanroom Class 100 (option) Vacuum down to 5 Torr (option) Fully Automatic Loading with EFEM (300mm wafer…